Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Assembly comprising a conditioning system and at least one object, a conditioning system, a lithographic apparatus and methods

Assembly comprising a conditioning system and at least one object, a conditioning system, a lithographic apparatus and methods

US Patent 8441610 · Granted May 14, 2013

Estimated economic value: $5,174,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate support and substrate table2025
Substrate holder for use in a lithographic apparatus2025
Fluid handling system and lithographic apparatus2024
Method of unloading an object from a support table2023
Substrate holder for use in a lithographic apparatus2023
Method of unloading an object from a support table2022
Extraction body for lithographic apparatus2022
Lithographic apparatus, support table for a lithographic apparatus and device ma2022
Method of unloading an object from a support table2021
Substrate holder for use in a lithographic apparatus2021
Lithographic apparatus, fluid handling structure for use in a lithographic appar2021
Lithographic apparatus, method of transferring a substrate and device manufactur2021