Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Plasma processing apparatus, focus ring, and susceptor

Plasma processing apparatus, focus ring, and susceptor

US Patent 8124539 · Granted Feb 28, 2012

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Motorcycle and/or replica thereof2025
Gas supply device and semiconductor manufacturing apparatus2025
Plasma processing method and plasma processing apparatus2025
Substrate processing apparatus2025
Plasma monitoring system, plasma monitoring method, and monitoring device2025
Plasma processing apparatus and substrate processing method2025
Plasma processing apparatus and method for controlling source frequency of sourc2025
Substrate processing apparatus, substrate processing system, and maintenance met2025
Plasma processing apparatus2025
Plasma processing apparatus2025
Plasma processing apparatus and mounting table thereof2025
Substrate support and substrate processing apparatus2025