Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Angled-wedge chrome-face wall for intensity balance of alternating phase shift mask

Angled-wedge chrome-face wall for intensity balance of alternating phase shift mask

US Patent 8034543 · Granted Oct 11, 2011

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Methods for extreme ultraviolet mask defect mitigation by multi-patterning2017
Pellicles and devices comprising a photomask and the pellicle2016
Pellicles and devices comprising a photomask and the pellicle2016
System and methods for OPC model accuracy management and disposition2016
Methods for extreme ultraviolet mask defect mitigation by multi-patterning2016
Method and apparatus for performing optical proximity and photomask correction2015
System and methods for OPC model accuracy management and disposition2015
Liquid immersion scanning exposure system using an immersion liquid confined wit2014
Etch failure prediction based on wafer resist top loss2014
Methods for enhancing photolithography patterning2013
Methods for enhancing photolithography patterning2013
Methods for enhancing photolithography patterning2013