Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

US Patent 8027026 · Granted Sep 27, 2011

Estimated economic value: $14,802,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and apparatus for inspection2025
Measuring method and measuring apparatus2025
Lithographic apparatus, device manufacturing method, and method of correcting a 2025
Substrate holder, lithographic apparatus, device manufacturing method, and metho2025
Substrate holder and method of manufacturing a substrate holder2025
Stage system, lithographic apparatus, method for positioning and device manufact2025
Systems and methods for manufacturing a double-sided electrostatic clamp2025
Lithographic apparatus and device manufacturing method2024
Method for producing a mirror of a microlithographic projection exposure apparat2024
Method to manufacture nano ridges in hard ceramic coatings2024
Computational wafer inspection2024
Lithographic apparatus, substrate table, and method2024