Method of apparatus for detecting particles on a specimen

Assignee

• Hitachi High-Technologies

Inventors

• Akira Hamamatsu (84 patents)
• Minori Noguchi (114 patents)
• Yoshimasa Ohshima (53 patents)
• Sachio Uto (77 patents)
• Taketo Ueno (22 patents)
• Hiroyuki Nakano (174 patents)
• Takahiro Jingu (66 patents)
• Hisashi Hatano (27 patents)
• Yukihisa Mohara (10 patents)
• Seiji Otani (11 patents)
• Takahiro Togashi (15 patents)

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