Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12276618 | Defect inspection device | Kazuhide Sato, Masami Makuuchi | 2025-04-15 |
| 10458924 | Inspection apparatus and inspection method | Hisaaki Kanai, Masami Makuuchi, Eiji Imai | 2019-10-29 |
| 9097686 | Optical type inspection apparatus, inspection system and the wafer for coordinates management | Yoshio Bamba, Kowa Tabei | 2015-08-04 |
| 8525984 | Inspection apparatus and inspection method | Hiroyuki Yamashita, Eiji Imai | 2013-09-03 |
| 8289507 | Method of apparatus for detecting particles on a specimen | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Sachio Uto, Taketo Ueno +5 more | 2012-10-16 |
| 7999932 | Inspection apparatus and inspection method | Hiroyuki Yamashita, Eiji Imai | 2011-08-16 |
| 7952700 | Method of apparatus for detecting particles on a specimen | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Sachio Uto, Taketo Ueno +5 more | 2011-05-31 |
| 7817261 | Method of apparatus for detecting particles on a specimen | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Sachio Uto, Taketo Ueno +5 more | 2010-10-19 |
| 7733473 | Inspection apparatus and inspection method | Hiroyuki Yamashita, Eiji Imai | 2010-06-08 |
| 7369223 | Method of apparatus for detecting particles on a specimen | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Sachio Uto, Taketo Ueno +5 more | 2008-05-06 |