Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9097686 | Optical type inspection apparatus, inspection system and the wafer for coordinates management | Yukihisa Mohara, Kowa Tabei | 2015-08-04 |
| 8625089 | Foreign matter inspection apparatus and foreign matter inspection method | Masayuki Ochi, Shigehisa Nozawa | 2014-01-07 |
| 7876431 | Foreign matter inspection apparatus and foreign matter inspection method | Masayuki Ochi, Shigehisa Nozawa | 2011-01-25 |
| 7589833 | Foreign matter inspection apparatus and foreign matter inspection method | Masayuki Ochi, Shigehisa Nozawa | 2009-09-15 |