Focus ring and plasma processing apparatus

Assignee

• Tokyo Electron Limited

Inventors

• Akira Koshiishi (66 patents)
• Hideaki Tanaka (367 patents)
• Nobuyuki Okayama (13 patents)
• Masaaki Miyagawa (11 patents)
• Shunsuke Mizukami (22 patents)
• Wataru Shimizu (46 patents)
• Jun Hirose (71 patents)
• Toshikatsu Wakaki (3 patents)
• Tomonori Miwa (5 patents)
• Jun Ooyabu (12 patents)
• Daisuke Hayashi (199 patents)

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