Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Decompression processing method for substrate processing apparatus and substrate processing apparatus

Decompression processing method for substrate processing apparatus and substrate processing apparatus

US Patent 12469684 · Granted Nov 11, 2025

Assignee

No assignee recorded.

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate processing system and method for installing edge ring2025
Plasma processing apparatus and cleaning method2025
Electrical storage device and method for making the same2023
All-solid-state battery positive electrode and all-solid-state battery2023
Solid state battery and solid state battery manufacturing method2023
Secondary battery and comb-type electrode2022
Laminated battery and manufacturing method of laminated battery2022
Solid state battery and solid state battery manufacturing method2022
Method for manufacturing solid-state battery and solid-state battery2022
Substrate processing apparatus and cleaning method2022
Composition for organic electroluminescent element, organic electroluminescent e2018
Layered alkali iridate, layered iridic acid, and iridium oxide nanosheet2017