Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate processing apparatus and cleaning method

Substrate processing apparatus and cleaning method

US Patent 11264218 · Granted Mar 1, 2022

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Decompression processing method for substrate processing apparatus and substrate2025
Substrate processing system and method for installing edge ring2025
Plasma processing apparatus and cleaning method2025
Electrical storage device and method for making the same2023
All-solid-state battery positive electrode and all-solid-state battery2023
Solid state battery and solid state battery manufacturing method2023
Secondary battery and comb-type electrode2022
Laminated battery and manufacturing method of laminated battery2022
Solid state battery and solid state battery manufacturing method2022
Method for manufacturing solid-state battery and solid-state battery2022
Composition for organic electroluminescent element, organic electroluminescent e2018
Layered alkali iridate, layered iridic acid, and iridium oxide nanosheet2017