Substrate processing system and method for installing edge ring

Assignee

• Tokyo Electron Limited

Inventors

• Takashi Aramaki (73 patents)
• Lifu LI (6 patents)
• Nobutaka SASAKI (12 patents)
• Toshiki AKAMA (2 patents)
• Shusei KATO (3 patents)
• Gyeong min PARK (5 patents)
• Wataru Shimizu (46 patents)
• Ryota Koitabashi (1 patents)

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