Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Optical measuring apparatus and operating method for imaging error correction in an optical imaging system

Optical measuring apparatus and operating method for imaging error correction in an optical imaging system

US Patent 7436521 · Granted Oct 14, 2008

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Measuring method and measuring system for interferometrically measuring the imag2020
Measuring method and measuring arrangement for an imaging optical system2019
Device and method for wavefront analysis2019
Microlithographic projection exposure apparatus and measuring device for a proje2019
Microlithographic projection exposure apparatus and measuring device for a proje2019
Method for adjusting a projection objective2018
Optical imaging device with image defect determination2018
Method for measuring an angularly resolved intensity distribution and projection2018
Illumination optical unit for projection lithography2017
Method for adjusting a projection objective2017
Measuring system for measuring an imaging quality of an EUV lens2016
Measuring system for measuring an imaging quality of an EUV lens2016