Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Measuring method and measuring system for interferometrically measuring the imaging quality

Measuring method and measuring system for interferometrically measuring the imaging quality

US Patent 10697852 · Granted Jun 30, 2020

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Measuring method and measuring arrangement for an imaging optical system2019
Device and method for wavefront analysis2019
Microlithographic projection exposure apparatus and measuring device for a proje2019
Optical imaging device with image defect determination2018
Exposure apparatus and measuring device for a projection lens2016
System for measuring the image quality of an optical imaging system2016
Optical imaging device with image defect determination2016
Device and method for the optical measurement of an optical system by using an i2014
System for measuring the image quality of an optical imaging system2014
Method for measuring an optical system2014
Optical scattering disk, use thereof, and wavefront measuring apparatus2014
Optical imaging device with image defect determination2013