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Home › Multiple frequency plasma chamber with grounding capacitor at cathode

Multiple frequency plasma chamber with grounding capacitor at cathode

US Patent 6857387 · Granted Feb 22, 2005

Estimated economic value: $18,056,000 ⓘ

Assignee

Applied Materials

Inventors

Sheng Sun (21 patents)
Jeff Olsen (5 patents)
Sanjay Yadav (23 patents)
Quanyuan Shang (57 patents)
Kam S. Law (71 patents)

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