Corner spoiler for improving profile uniformity

Assignee

• Applied Materials

Inventors

• Lai ZHAO (26 patents)
• Gaku Furuta (32 patents)
• Qunhua Wang (21 patents)
• Robin L. Tiner (61 patents)
• Beom Soo Park (68 patents)
• Soo Young Choi (176 patents)
• Sanjay Yadav (23 patents)

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