Plasma film forming method and plasma film forming apparatus

Assignee

• Tokyo Electron Limited

Inventors

• Takashi Akahori (18 patents)
• Masaki Tozawa (5 patents)
• Yoko Naito (5 patents)
• Risa Nakase (7 patents)
• Osamu Yokoyama (100 patents)
• Shuichi Ishizuka (10 patents)
• Shunichi Endo (11 patents)
• Masahide Saito (25 patents)
• Takeshi Aoki (208 patents)
• Tadashi Hirata (64 patents)

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