Charged beam lithography system

Assignee

• Kabushiki Kaisha Toshiba

Inventors

• Mitsuko Shimizu (4 patents)
• Takayuki Abe (132 patents)
• Hirohito Anze (10 patents)
• Susumu Oogi (5 patents)
• Takashi Kamikubo (20 patents)
• Eiji Murakami (52 patents)
• Yoshiaki Hattori (20 patents)
• Tomohiro Iijima (15 patents)
• Hitoshi Higurashi (17 patents)
• Kazuto Matsuki (11 patents)

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