{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Ceramic protection for heated metal surfaces of plasma processing chamber exposed to chemically aggressive gaseous environment therein and method protecting such heated metal surfaces", "item": "https://www.patentleaderboard.com/patent/5959409"}]}

Home › Ceramic protection for heated metal surfaces of plasma processing chamber exposed to chemically aggressive gaseous environment therein and method protecting such heated metal surfaces

Ceramic protection for heated metal surfaces of plasma processing chamber exposed to chemically aggressive gaseous environment therein and method protecting such heated metal surfaces

US Patent 5959409 · Granted Sep 28, 1999

Estimated economic value: $70,146,000 ⓘ

Assignee

Applied Materials

Inventors

Charles Dornfest (34 patents)
John M. White (252 patents)
Craig Bercaw (26 patents)
Hiroyuki Steven Tomosawa (2 patents)
Mark Fodor (26 patents)

View full patent text on Google Patents →