Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Positioning device with a reference frame for a measuring system, and a lithographic device provided with such a positioning device

Positioning device with a reference frame for a measuring system, and a lithographic device provided with such a positioning device

US Patent 5953105 · Granted Sep 14, 1999

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Laser focussing module2024
Y-theta table for semiconductor equipment2021
CVD or PVD reactor for coating large-area substrates2020
Control system, positioning system, lithographic apparatus, control method, devi2018
Sensor, object positioning system, lithographic apparatus and device manufacturi2018
Stage positioning system and lithographic apparatus2018
Positioning device, control device and control method2016
Lithographic apparatus, method of deforming a substrate table and device manufac2016
Lithographic apparatus, and patterning device for use in a lithographic process2016
Suction unit and autonomous vacuum cleaner2015
Lithographic apparatus comprising a substrate table and a surface substrate actu2015
Lithographic apparatus, and patterning device for use in a lithographic process2015