Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5953105 | Positioning device with a reference frame for a measuring system, and a lithographic device provided with such a positioning device | Gerard Van Engelen, Frank Bernhard Sperling, Henricus Wilhelmus Aloysius Janssen, Adianus G. Bouwer, Cornelis D. Van Dijk +2 more | 1999-09-14 |
| 5844664 | Positioning device with a force actuator system for compensating center-of-gravity displacements, and lithographic device provided with such a positioning device | Johannes M. M. Van Kimmenade, Jan Van Eijk | 1998-12-01 |