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Home › Ceramic protection for heated metal surfaces of plasma processing chamber exposed to chemically aggressive gaseous environment therein and method of protecting such heated metal surfaces

Ceramic protection for heated metal surfaces of plasma processing chamber exposed to chemically aggressive gaseous environment therein and method of protecting such heated metal surfaces

US Patent 5680013 · Granted Oct 21, 1997

Estimated economic value: $85,045,000 ⓘ

Assignee

Applied Materials

Inventors

Charles Dornfest (34 patents)
John M. White (252 patents)
Craig Bercaw (26 patents)
Hiroyuki Steven Tomosawa (2 patents)
Mark Fodor (26 patents)

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