Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Gas-based substrate protection during processing

Gas-based substrate protection during processing

US Patent 5238499 · Granted Aug 24, 1993

Estimated economic value: $6,584,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Reduced footprint wafer handling platform2025
Printing a chemical mechanical polishing pad2024
Dual-mode autonomous guided vehicle2024
Printing a chemical mechanical polishing pad2023
Moving substrate transfer chamber2022
Printing a chemical mechanical polishing pad2021
Printing a chemical mechanical polishing pad2020
Additively manufactured gas distribution manifold2020
Vacuum robot positioning system with reduced sensitivity to chamber pressure2019
Additively manufactured gas distribution manifold2019
Printing a chemical mechanical polishing pad2018
Method for depositing a diffusion barrier layer and a metal conductive layer2018