Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Moving substrate transfer chamber

Moving substrate transfer chamber

US Patent 11282737 · Granted Mar 22, 2022

Estimated economic value: $297,305,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Reduced footprint wafer handling platform2025
Plasma processing devices having multi-port valve assemblies2024
Plasma processing devices having multi-port valve assemblies2024
Plasma processing devices having multi-port valve assemblies2024
Integrated tool lift2024
Dual-mode autonomous guided vehicle2024
Integrated tool lift2022
Additively manufactured gas distribution manifold2020
Chamber with vertical support stem for symmetric conductance and RF delivery2020
Vacuum robot positioning system with reduced sensitivity to chamber pressure2019
Chamber with vertical support stem for symmetric conductance and RF delivery2019
Compression member for use in showerhead electrode assembly2019