Pattern defect inspection apparatus

Assignee

• Hitachi

Inventors

• Kyo Suda (4 patents)
• Shigeharu Kimura (29 patents)
• Shinobu Hase (2 patents)
• Chusuke Munakata (13 patents)
• Kanji Kinameri (3 patents)
• Yoshitoshi Ito (39 patents)
• Hiroto Nagatomo (11 patents)
• Yuzo Taniguchi (18 patents)
• Mikihito Saito (2 patents)

View full patent text on Google Patents →