Method for inspecting pattern defects

Assignee

• TSMC

Inventors

• Ju-Ying CHEN (1 patents)
• Che-Yen Lee (2 patents)
• Chia-Fong Chang (3 patents)
• Hua-Tai Lin (63 patents)
• Te-Chih Huang (24 patents)
• Chi-Yuan Sun (11 patents)
• Jiann Yuan Huang (6 patents)

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