Atomic layer etch and selective deposition process for extreme ultraviolet lithography resist improvement

Assignee

• Lam Research

Inventors

• Jengyi Yu (36 patents)
• Samantha Tan (31 patents)
• Liu-Yang Yang (40 patents)
• Chen-Wei Liang (6 patents)
• Boris Volosskiy (14 patents)
• Richard Wise (36 patents)
• Yang Pan (161 patents)
• Da Li (6 patents)
• Ge Yuan (4 patents)
• Andrew Xiao Liang (54 patents)

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