Rapid flush purging during atomic layer deposition

Assignee

• Lam Research

Inventors

• Pragna Nannapaneni (2 patents)
• Sema Ermez (6 patents)
• Novy Tjokro (8 patents)
• Ruopeng Deng (5 patents)
• Tianhua Yu (4 patents)
• Xiaolan Ba (11 patents)
• Juwen Gao (32 patents)
• Sanjay Gopinath (31 patents)

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