Method of lithography process and transferring a reticle

Assignee

• TSMC

Inventors

• Hsiao-Lun Chang (13 patents)
• Chueh-Chi Kuo (19 patents)
• Tsung-Yen Lee (29 patents)
• Tzung-Chi Fu (68 patents)
• Li-Jui Chen (264 patents)
• Po-Chung Cheng (152 patents)
• Che-Chang Hsu (20 patents)

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