Replaceable module for a charged particle apparatus

Assignee

• Asml Netherlands B.V.

Inventors

• Christiaan OTTEN (5 patents)
• Peter-Paul CRANS (1 patents)
• Marc Smits (12 patents)
• Laura DEL TIN (2 patents)
• Christan TEUNISSEN (1 patents)
• Yang-Shan Huang (21 patents)
• Stijn Wilem Herman Karel STEENBRINK (3 patents)
• Xuerang Hu (49 patents)
• Qingpo Xi (12 patents)
• Xinan Luo (4 patents)
• Xuedong Liu (101 patents)

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