Tool for testing an electron-optical assembly

Assignee

• Asml Netherlands B.V.

Inventors

• Arjen Storm (9 patents)
• Johan Frederik Cornelis VAN GURP (2 patents)
• Henri Kristian Ervasti (1 patents)
• Aaron Yang-Fay AYAL (2 patents)
• Stijn Wilem Herman Karel STEENBRINK (3 patents)
• Marco Jan-Jaco Wieland (89 patents)

View full patent text on Google Patents →