Methods and apparatus for processing a substrate

Assignee

• Applied Materials

Inventors

• Jethro Tannos (7 patents)
• Bhargav S. Citla (20 patents)
• Srinivas D. Nemani (236 patents)
• Ellie Yieh (178 patents)
• Joshua Rubnitz (6 patents)
• Erica Chen (21 patents)
• Soham Asrani (3 patents)
• Nikolaos Bekiaris (23 patents)
• Douglas A. Buchberger, Jr. (121 patents)

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