Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for controlling a manufacturing apparatus and associated apparatuses

Method for controlling a manufacturing apparatus and associated apparatuses

US Patent 11669017 · Granted Jun 6, 2023

Estimated economic value: $66,472,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Determining a correction to a process2025
Methods and apparatus for controlling a lithographic process2025
Methods and apparatus for controlling a lithographic process2025
Determining lithographic matching performance2025
Determining lithographic matching performance2025
Methods and apparatus for obtaining diagnostic information relating to an indust2025
Method for controlling a semiconductor manufacturing process2025
Method of wafer alignment using at resolution metrology on product features2024
Determining a correction to a process2024
Methods and apparatus for obtaining diagnostic information relating to an indust2024
Method for controlling a lithographic apparatus2023
Method for controlling a manufacturing process and associated apparatuses2023