Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Methods and apparatus for controlling contact resistance in cobalt-titanium structures

Methods and apparatus for controlling contact resistance in cobalt-titanium structures

US Patent 11424132 · Granted Aug 23, 2022

Estimated economic value: $37,610,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Directional selective junction clean with field polymer protections2025
Directional selective junction clean with field polymer protections2025
Methods and apparatus for enhancing selectivity of titanium and titanium silicid2025
Methods and apparatus for enhancing selectivity of titanium and titanium silicid2025
Methods and apparatus for enhancing selectivity of titanium and titanium silicid2025
Self field-suppression CVD tungsten (W) fill on PVD W liner2025
Metal oxide preclean for bottom-up gapfill in MEOL and BEOL2025
One chamber multi-station selective metal removal2025
Electrical contact cavity structure and methods of forming the same2025
Methods for controlling contact resistance in cobalt-titanium structures2025
Methods for controlling contact resistance in cobalt-titanium structures2025
Methods for controlling contact resistance in cobalt-titanium structures2025