Apparatuses for thin film deposition

Assignee

• Asm Ip Holding B.V.

Inventors

• Unknown
• Suvi Haukka (176 patents)
• Antti Niskanen (70 patents)
• Eva Tois (68 patents)
• Raija H. Matero (33 patents)
• Hidemi Suemori (29 patents)
• Jaakko Anttila (15 patents)
• Yukihiro Mori (141 patents)

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