Method for preventing line bending during metal fill process

Assignee

• Lam Research

Inventors

• Adam Jandl (3 patents)
• Sema Ermez (6 patents)
• Lawrence Schloss (38 patents)
• Sanjay Gopinath (31 patents)
• Michal Danek (93 patents)
• Siew Neo (27 patents)
• Joshua Collins (59 patents)
• Hanna Bamnolker (23 patents)

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