Gas cluster processing device and gas cluster processing method

Assignee

• Tokyo Electron Limited
• Iwatani

Inventors

• Kazuya Dobashi (27 patents)
• Takehiko Orii (62 patents)
• Yukimasa Saito (19 patents)
• Kunihiko Koike (18 patents)
• Takehiko Senoo (9 patents)
• Koichi Izumi (15 patents)
• Yu Yoshino (7 patents)
• Tadashi Shojo (4 patents)
• Keita Kanehira (2 patents)

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