Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Fluid handling structure, lithographic apparatus and device manufacturing method

Fluid handling structure, lithographic apparatus and device manufacturing method

US Patent 11143968 · Granted Oct 12, 2021

Estimated economic value: $55,748,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Measuring method and measuring apparatus2025
Temperature conditioning system, a lithographic apparatus and a method of temper2025
Substrate holder, lithographic apparatus, device manufacturing method, and metho2025
Substrate holder and method of manufacturing a substrate holder2025
Stage system, lithographic apparatus, method for positioning and device manufact2025
Lithographic apparatus and device manufacturing method2024
Lithographic apparatus and device manufacturing method2024
Lithographic apparatus and a method of operating the apparatus2024
Lithographic apparatus and a method of operating the apparatus2024
Contamination trap2024
Substrate holder, lithographic apparatus, device manufacturing method, and metho2024
Stage system, lithographic apparatus, method for positioning and device manufact2024