Pellicle removal method

Assignee

• TSMC

Inventors

• Chue-San Yoo (61 patents)
• Chih-Chiang Tu (74 patents)
• Chien-Cheng Chen (70 patents)
• Jong-Yuh Chang (23 patents)
• Kun-Lung Hsieh (20 patents)
• Pei-Cheng Hsu (79 patents)
• Hsin-Chang Lee (159 patents)
• Yun-Yue Lin (68 patents)

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