Method and apparatus for inspection

Assignee

• Asml Netherlands B.V.

Inventors

• Bernardo Kastrup (11 patents)
• Johannes Catharinus Hubertus Mulkens (202 patents)
• Marinus Aart Van Den Brink (26 patents)
• Jozef Petrus Henricus Benschop (32 patents)
• Erwin Paul SMAKMAN (13 patents)
• Tamara Druzhinina (11 patents)
• Coen Adrianus Verschuren (44 patents)

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