Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Determining a correction to a process

Determining a correction to a process

US Patent 11086305 · Granted Aug 10, 2021

Estimated economic value: $38,498,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for optimizing a sampling scheme and associated apparatuses2025
Determining a correction to a process2025
Determining a correction to a process2025
Determining a correction to a process2025
Determining a correction to a process2025
Metrology method and associated metrology and lithographic apparatuses2025
Methods and apparatus for controlling a lithographic process2025
Methods and apparatus for controlling a lithographic process2025
Determining lithographic matching performance2025
Method for modeling measurement data over a substrate area and associated appara2025
Method for controlling a semiconductor manufacturing process2025
Method of wafer alignment using at resolution metrology on product features2024