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Home › Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, and method to control a gravity compensator having a negative stiffness

Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, and method to control a gravity compensator having a negative stiffness

US Patent 11029612 · Granted Jun 8, 2021

Estimated economic value: $44,613,000 ⓘ

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