Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Polishing apparatus using neural network for monitoring

Polishing apparatus using neural network for monitoring

US Patent 10994389 · Granted May 4, 2021

Estimated economic value: $101,757,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Control substrate polishing using constrained cost function2025
In-situ monitoring to label training spectra for machine learning system for spe2025
Passive acoustic monitoring and acoustic sensors for chemical mechanical polishi2025
Determining substrate orientation with acoustic signals2025
Polishing apparatus using neural network for monitoring2025
Polishing apparatus using neural network for monitoring2025
Polishing apparatus using neural network for monitoring2025
Polishing apparatus using neural network for monitoring2025
Polishing apparatus using neural network for monitoring2025
Compensation for substrate doping in edge reconstruction for in-situ electromagn2025
Compensation for substrate doping in edge reconstruction for in-situ electromagn2025
Pressure signals with different frequencies during friction monitoring to provid2025