Stressed decoupled micro-electro-mechanical system sensor

Assignee

• Infineon Technologies Dresden

Inventors

• Horst Theuss (201 patents)
• Bernhard Knott (15 patents)
• Thoralf Kautzsch (88 patents)
• Mirko Vogt (41 patents)
• Maik Stegemann (35 patents)
• Andre Roeth (12 patents)
• Marco Haubold (5 patents)
• Heiko Froehlich (30 patents)
• Wolfram Langheinrich (14 patents)
• Steffen Bieselt (36 patents)

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