Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Particle detection for substrate processing

Particle detection for substrate processing

US Patent 10845317 · Granted Nov 24, 2020

Estimated economic value: $38,395,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

End effector2025
In-situ reflectometry for real-time process control2025
Time delay integration acquisition for spatial genomics imaging2025
Systems and methods for monitoring and controlling a vehicle with redundant brak2025
Automated closed system for cell therapy manufacturing2025
Subsurface alignment metrology system for packaging applications2025
Autonomous driving vehicle redundant holding control to prevent rolling2025
Failsafe braking systems with independent braking actuations for autonomous or a2025
Adaptive control of variability in device performance in advanced semiconductor 2025
Image based metrology of surface deformations2025
System and method to map thickness variations of substrates in manufacturing sys2025
System and method to map thickness variations of substrates in manufacturing sys2025