Electrostatic chuck with variable pixelated magnetic field

Assignee

• Applied Materials

Inventors

• Chih-Hsun Hsu (14 patents)
• Tza-Jing Gung (57 patents)
• Benjamin Schwarz (54 patents)
• Shahid Rauf (90 patents)
• Ankur Agarwal (20 patents)
• Vijay D. Parkhe (143 patents)
• Michael D. Willwerth (52 patents)
• Zhiqiang Guo (34 patents)

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