Low resistivity films containing molybdenum

Assignee

• Lam Research

Inventors

• Shruti Vivek Thombare (13 patents)
• Raashina Humayun (70 patents)
• Michal Danek (93 patents)
• Chiukin Steven Lai (14 patents)
• Joshua Collins (59 patents)
• Hanna Bamnolker (23 patents)
• Griffin John Kennedy (4 patents)
• Gorun Butail (6 patents)
• Patrick A. Van Cleemput (55 patents)

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