Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Fixing unit of plate-shaped member, PVD processing apparatus and fixing method of plate-shaped member

Fixing unit of plate-shaped member, PVD processing apparatus and fixing method of plate-shaped member

US Patent 10254693 · Granted Apr 9, 2019

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and device for substrate processing2025
Mounting table and substrate processing apparatus2025
Mounting table and substrate processing apparatus2025
Substrate transfer device and substrate processing system2025
Mounting table structure, substrate processing apparatus, and method of controll2025
Vacuum processing apparatus2024
Substrate transfer apparatus and substrate processing system2024
Film thickness measuring apparatus and film thickness measuring method, and film2024
Substrate transfer apparatus and substrate processing system2023
Temperature measuring mechanism, temperature measuring method, and stage device2023
Temperature measuring mechanism, temperature measuring method, and stage device2023
Temperature measuring mechanism, temperature measuring method, and stage device2023