Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Film thickness measuring apparatus and film thickness measuring method, and film forming system and film forming method

Film thickness measuring apparatus and film thickness measuring method, and film forming system and film forming method

US Patent 11939665 · Granted Mar 26, 2024

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate processing apparatus and abnormality detection method2025
Substrate processing apparatus and abnormality detection method2025
Placing table and substrate processing apparatus2025
Substrate processing apparatus2025
Substrate processing apparatus2025
Conductive superlattice structures and methods of forming the same2025
Method and device for substrate processing2025
Method and device for substrate processing2025
Film forming apparatus, processing condition determination method, and film form2025
Substrate transfer device and substrate processing system2025
Mounting table structure, substrate processing apparatus, and method of controll2025
Processing method and processing apparatus2025