Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Temperature measuring mechanism, temperature measuring method, and stage device

Temperature measuring mechanism, temperature measuring method, and stage device

US Patent 11605547 · Granted Mar 14, 2023

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and device for substrate processing2025
Method and device for substrate processing2025
Mounting table and substrate processing apparatus2025
Substrate processing apparatus, temperature control method of substrate processi2025
Substrate transfer device and substrate processing system2025
Substrate processing device and method of manufacturing substrate processing dev2025
Method for manufacturing substrate with sensor2024
Vacuum processing apparatus2024
Substrate transfer apparatus and substrate processing system2024
Film thickness measuring apparatus and film thickness measuring method, and film2024
Temperature sensor, temperature measuring device, and temperature measuring meth2024
Substrate transfer apparatus and substrate processing system2023