Issued Patents All Time
Showing 101–111 of 111 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6093457 | Method for plasma processing | Ichiro Nakayama | 2000-07-25 |
| 6030667 | Apparatus and method for applying RF power apparatus and method for generating plasma and apparatus and method for processing with plasma | Hideo Nakagawa, Shigenori Hayashi, Ichiro Nakayama | 2000-02-29 |
| 5922223 | Plasma processing method and apparatus | Hideo Haraguchi, Ichiro Nakayama, Yoshihiro Yanagi | 1999-07-13 |
| 5916820 | Thin film forming method and apparatus | Ichiro Nakayama, Yuichiro Yamada, Naoki Suzuki | 1999-06-29 |
| 5888413 | Plasma processing method and apparatus | Ichiro Nakayama, Yoshihiro Yanagi | 1999-03-30 |
| 5711850 | Plasma processing apparatus | Ichiro Nakayama, Yoshihiro Yanagi | 1998-01-27 |
| 5693236 | Water-repellent surface structure and its fabrication method | Ichiro Nakayama, Chikako Goto, Tadashi Imai | 1997-12-02 |
| 5609690 | Vacuum plasma processing apparatus and method | Syouzou Watanabe, Masaki Suzuki, Ichiro Nakayama | 1997-03-11 |
| 5558722 | Plasma processing apparatus | Ichiro Nakayama, Yoshihiro Yanagi | 1996-09-24 |
| 5372648 | Plasma CVD system | Shigeyuki Yamamoto, Yuichiro Yamada, Ryuzoh Hohchin, Hiroshi Tanabe | 1994-12-13 |
| 5265850 | Refractory for gas blowing for molten metal refining vessel | Keizo Aramaki | 1993-11-30 |